About us
Saxony Thermal is a second source supplier of parts, upgrades, and services to the semiconductor industry worldwide.
Founded in 2011 and with customers around the world, we have been setting the example for the second source market ever since
Products
From o-ring kits to total tool refurbishment, we have everything you need to maintain and improve your Epsilon tools for years to come.
We have so much to offer
The products on this website are only some of the most relevant parts in the tool. Saxony Thermal offers 95% of the parts in the Epsilon. For a complete list of parts available from Saxony Thermal click the link below to request our current price list. Or click the “See More Products” button to continue exploring.