about us

Saxony Office.jpg

Since 2011, Saxony thermal has been offering a specialized second source solution to maintaining the epsilon platform around the world. With over 50 customers around the world and over 100 years combined experience you can rest assured, we can add value to your organization, and positively impact your bottom line.


some of our offerings

Injector Cartridges

• New Construction

• Flow and leak tested

• Calibration Certificate

CAD Designed Gas Panels

•Computer Designed

•Completely Replaces existing panel

•ROI Effective solution to old panels

•Fully Customizable

Gespac Components

•Certified Refurbishment Loops

•Many Parts in inventory

•In House Simulator

H2 Detection

• completely replaces obsolete gastech system

• seamlessly integrates with epsilon controller

• plug and play

• one day installation

LCD Monitor Upgrade

•One day installation

•Fully compatible with EPI software

•Upgraded resolution

•Touch screen compatible

Process Engineering

•Factory Trained Process Engineers

•Expert recipe knowledge / enhancement

•Expert Process development

•After major PM tune to production

•Tool matching

Zeta Driver Refub

• Certified Refurbishment Loop

• Plug and Play replacement

• Replace individual units

• Upgrade in development

RP Swap Kit

•Complete set of plumbing and valves

•improves green to green time

•no more waiting for pipes to dry

•including exhaust flange to facility connection

Hardware Engineering

•Factory Trained Field Service Engineers

•expert service for the ASM Epsilon platform

•Troubleshooting break / fix

•Scheduled maintenance / PM refinement

•Service Contracts



Contact Us

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Our Office

7275 NE Evergreen Pkwy, Ste 100
Hillsboro, OR, 97124
United States