h2 detection RFK
update your safety system
We’ve shipped and installed over 100 of this retrofit kit, and we’re still taking orders! As is true with our other RFKs, this system has been developed to be customer installable. There are no terminal connections to make. All cables come with the correct connectors to interconnect the system and to interface with the tool making this a true plug and play retrofit.
Customer installable means there is no scheduling outside services for installation. Your company’s technical staff will have no trouble installing this kit with the included documentation and remote support from Saxony Thermal. Add the installation of this kit to a chamber PM and realize little added downtime.
What’s in the box
the module rack
The module rack is pre-assembled with the power cable, interface to EPI cable and a connector plate ready to recieve the individual sensors.
Load lock sample sensor
The load lock sample sensor is pre-assembled with its mounting bracket and module rack connector.
whc sensor
The WHC sensor is pre-assembled and ready to mount to the WHC. The cable also includes its module rack connector.
reactor and gas panel sensors
The reactor and gas panel sensors are ready to mount in the cabinets and connected to the module rack.
Total Support
As is true with most of our upgrades, we’ve designed this kit to be installed by our customers. We’re available to help you remotely, or if you prefer we can schedule installation by one of our Field Service Engineers. Either way, we’re going to ensure that you’re satisfied and successful with our products. Contact our sales department if you have any questions about this or any of our other products.