advanced epsilon temperature control
If you’re going to upgrade your temperature controller, make sure it’s an upgrade
Gold reflectors
Developed with the plating industry’s leaders for long life and quick delivery
remanufactured tools
Remanufactured means just what you think it does, only better! Good as new with the latest upgrades
what can we help you with
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upgrades & retrofits
Parts and sub-systems become obsolete as the years go by. Saxony Thermal has developed replacements, that are improvements over the legacy assemblies. Water cooling, air cooling, temperature control, right down to a small laser sensor in the wafer handing module, we have the solution.
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Spare Parts
Way too much to list. Put simply, the only parts of the Epsilon we don’t supply are the quartz and graphite. But our partners do! We’ll introduce you.
We supply everything you need to keep your Epsilon running. Because we buy in larger volumes we’re happy to discuss structured parts contracts with better pricing, scheduled delivery and invoicing, or just help you with the part you need. Contact our sales team today now matter the size of your parts order.
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Modular Refurbishment
Developed by Saxony Thermal, modular refurbishment allows customers to custom tailor their own insitu tool refurbishment. From replacing a single rotation or lift assembly to a complete tool refurbishment. We can help you bring new life and years of serviceability back into your tools. All modules are customer installable, but we’re happy to come on site and complete the project for you.
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gold reflectors
Saxony Thermal has worked with the plating industry’s leaders to develop our own complete line of gold reflectors. Whatever your part you need for your Epsilons, Saxony Thermal can supply it. And we likely have it in stock right now!
remanufactured tools
Remanufactured means what you think it does. As good as new if not better than new. We install all the latest upgrades and systems, new gold reflectors, new wiring and pneumatics, completely new gas panels and even recoat all the sheet metal. Every remanufactured tool that leaves our facility is completely tested and ready to be installed and carries a one-year warranty.
Because we have an inventory of core tools, and a large inventory of components, we can deliver a remanufactured tool with your desired configuration in as little as 12 weeks.
exchange tools
Let’s face it, these tools have been around for some time now. And despite good servicing and maintenance, sometimes you just need to move on to something new. If you’re not looking to expand your fleet of tools but just have some tools that require major overhauling and updating that modular refurbishment can’t handle, we’ve though of that too.
We maintain and inventory of core tools that we can remanucature to your confiuration and take your older tool in on exchange. From decomission to qualification, only we can provide this exclusive service.
Who we are
For the past fifteen years Saxony Thermal has been innovating and exploring new technologies that will improve and add years of serviceability to your epi tools. Our in house engineering team works with industry leading suppliers to ensure that our products are easy to install, use and most importantly add real value to your epi organization.
With our proven track record, worldwide customer base, excellent supplier network and extensive intellectual property portfolio, Saxony Thermal is the industry’s leader for your epitaxial needs.