RP Swap Kit

Faster Green To Green Times

Cleaning and preparing exhaust plumbing parts during a PM can take hours. Why not do this after the tool is back up and running? With an extra set of plumbing, you can do just that. And all that gained production time means a short ROI on these kits.

As Much Or As Little As You Need

Weather you need a complete kit with plumbing, valves, gimbal, exhaust flange and TC plate, or just the pipes. We have, or can assemble a kit to suit your needs. We also have you covered for the spare parts as you need them over time.

Cleaner Process

Adding this stack to your chamber change procedure will not only allow you to do faster exhaust stack changes, but it will actually improve your tools intrinsic and particle performance as well. If you could do a stack change quickly, you’ll do it more often. If you do it more often there will be less process residue to contribute to particles, and background resistivity.

Complete System

These kits are an extra set up plumbing, valves and exhaust flange that can be cleaned between PMs. Think of the time that can be saved by having an extra exhaust system. No rushing to clean plumbing parts DURING a PM. Do it after the tool is back up. Assemble them on our RP Plumbing Cart, leak test and you’re ready to go for the next tool.