RP Plumbing Cart

Knowing that your RP stack is complete, properly aligned and leak tested BEFORE you even begin your chamber and exhaust PM can save hours of valuable scheduled downtime. Our RP plumbing cart will allow you to do just that.

Exhaust flange, TC plate, pipe sections, and everything else lives on board. The bottom of the cart is also a great place to keep o-ring kits, graphite, small quartz parts, thermocouples, and any special tools ready to go. Just add a chamber, and you’ll know everything is ready to go. It’s this level of preparation that saves hours of time.

Adding this stack to your chamber change procedure will not only allow you to do faster exhaust stack changes, but it will actually improve your tools’ intrinsic and particle performance as well.

If you could do a stack change quickly, you’ll do it more often. If you do it more often there will be less process residue to contribute to particles and background resistivity.

Because the stack has already been assembled, aligned, and leak tested on the cart it can be installed into the tool in large sections. And this means fewer places to look should you have a leak after installation.

Our cart has been designed to work with our Reduced Pressure Swap Kits. These kits are an extra set up plumbing, valves, and exhaust flange that can be cleaned between PMs. Think of the time that can be saved by having an extra exhaust system. No rushing to clean plumbing parts DURING a PM. Do it after the tool is back up. Assemble them on the cart, leak test and you’re ready to go for the next tool. Check out our swap kits here.